润西微电子（重庆）有限公司润西 EPI TF工艺备品备件(AMAT)2025年度采购公告

行号

物品/项目名称

单位

需求数量

补充说明

1

PEERAM005A DOME, UPPER, EPI 300MM RP

个

2

无

2

PEERAM013A LINER, CHAMBER UPPER X-FLOW, EPI 300MM

个

5

无

3

PEERAM012A LINER, CHAMBER LOWER X-FLOW BFE, EPI 300MM

个

5

无

4

PEEAQU005A INSERT, CHAMBER INLET, 5 ZONE

个

10

无

5

PEEAQU009A SHAFT, WAFER LIFT, 9.0 BC

个

2

无

6

PEERAM004A SIX ARM SUSCEPTOR SUPPORT SHAFT

个

2

无

7

PEERAM001A INSERT, CHAMBER EXHAUST LINER, QUARTZ, E

个

10

无

8

PEEAOT034A BLOCK, CHAMB LINER INSERT, X-FLOW SVT, EPI 300MM

个

2

无

9

PEEAOT033A BAFFLE, INJECT, LTV, HIGH OUTER FLOW, EPI 300MM

个

2

无

10

PEEAVA027A INSERT, SLIT VALVE TUNNEL W/PINNING, EPI

个

4

无

11

PEEAOT032A QUARTZ PIN, EXTENDED HD SLIT TUNNEL INSE

个

2

无

12

PEEAQU007A DOME, LOWER, EPI/HTF 300MM

个

2

无

13

PEEAQU004A DOME, UPPER CURVED, EPI 300MM

个

6

无

14

PEEAQU010A LINER, CHAMBER, UPPER, .25 POCKET, EXTENDED EXHAUST

个

6

无

15

PEEAQU006A LINER, CHAMBER LOWER X-FLOW, PARTITIonED VENTED, W/ PINNING, ATM, EPI 300MM

个

6

无

16

PEEAQU005A INSERT, CHAMBER INLET, 5 ZONE

个

10

无

17

PEEAQU009A SHAFT, WAFER LIFT, 9.0 BC

个

2

无

18

PEEAQU008A SHAFT SUSCEPTOR SUPPORT W/O CENTER PIN, EPI 300MM

个

6

无

19

PEEAQU003A INSERT, SST, CHAMBER EXHAUST, EPI 300MM

个

12

无

20

PEEAOT034A BLOCK, CHAMBER LINER INSERT, X-FLOW, EPI

个

2

无

21

PEEAOT033A BAFFLE, INJECT, LTV, HIGH OUTER FLOW, EPI 300MM

个

2

无

22

PEEAVA027A INSERT, SLIT VALVE TUNNEL W/PINNING, EPI 300MM

个

4

无

23

PEEAOT032A QUARTZ PIN, EXTENDED HD SLIT TUNNEL INSERT LOCKING, EPI 300MM

个

2

无

24

PEEAQU007A DOME, LOWER, EPI/HTF 300MM

个

2

无

25

PEERAM002A LAMP, 2KW 120V, EPI

个

200

无

26

PVPRSR002A SCREW LIFT HOOP HAYNES 242 PROCEDURE SE

个

10

无

27

PVPRSR003A WASHER 3/16#10 SPRING INConEL X.750 NI CONTRACT

个

10

无

28

PVPRVC004A SCREW,8-32 VENTED,BLOCKER,PROD

个

180

无

29

PVPRVC043A SCREW, PUMPING PORT DAM, SACVD PRODUCER SE

个

20

无

30

PVULIS001A RUBBER,SICONE,HEAT CONDUCT,0.40"THK 18" X 18" TA

个

2

无

31

PVULIS002A PAD,THERMAL,SIDE COIL ASSY,300MM ULTIMA X HDPC

个

19

无

32

PVULVC016A WASHER, NOZZLE, ULTIMA HDPCVD

个

20

无

33

PSENOT141A Execta AL,SCR CAP HD HEX SKT 10-24X.750LG ASME B

个

200

无

34

PSENOT142A Execta AL adapter cooling water parts,ORING ID.674 CSD.103 VITON 75DURO BLK

个

2

无

35

PSENOT145A Execta AL,FTG NIPPLE MALE PIPE 3/8NPT X 3/8 NPT

个

7

无

36

PSENOT166A Execta AL,PLUG BTN STD .750 DIA-HOLE .92X.08 HD BRS,NI PLT

个

6

无

37

PSENOT169A Execta AL,WSHR FLAT #10.438OD X.219ID X.049THK SST

个

7

无

38

PSENOT256A IMP KITS,WSHRELAT *10 3750DX195IDX 060THK SST

个

5

无

39

PSENOT303A IMP,WSHR BLVL #8.315OD X.165ID X.016T INCONEL

个

50

无

40

PSENAS025A TXZ, CVG KITS, OUTPUT MANIFOLD, GAS BOX SIDE,CVG

个

2

无

41

PSENAS029A TXZ, CVG KITS, MAINFOLD, LID GAS/WATER INLET,CVG,代替0040-03617

个

2

无

42

PSENOT192A SCRCAP SKT HD 8-32 X 1/4L HEX SKT SST SL

个

100

无

43

PSENOT194A SCRCAP SKT HD 8-32 X 1/8L HEX SKT SST SL

个

100

无

44

PSENOT224A STRAP , EQUIPOTENTIAL , DT - ESC 300MM

个

2

无

45

PSENSR003A SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST SLVR-PLT，IMP Feedthrough和DS TTN背面的3颗螺丝 (通用)

个

7

无

46

PSENSR008A SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR IMP,300MM

个

23

无

47

PSENSR009A SCREW,8-32X1"L SKT HD CAP,TORX, NITRONI",IMP RF Housing螺丝

个

23

无

48

PSENSR010A SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRO",IMP Ti Coil螺丝

个

33

无

49

PSENSR012A TXZ_SCREW, CENTERING PURGE HEATER SST, 300MM,Edge ring上锁的3颗螺丝

个

18

无

50

PSENSR017A TXZ, showerhead screw, 10-24, 1.5L HEX SKT SST SLVR-PLT

个

43

无